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Floating tip nanolithography.

NANO LETTERS(2008)

引用 45|浏览14
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摘要
We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of similar to 20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (at ambient conditions) 1-4 nanometers above the surface without touching it. Field enhancement at the tip-sample gap or high tip temperature are identified as the causes of material ablation.
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