Research on Calibration Uncertainty Evaluation Method of Transfer Standards for Calibrating the On-Wafer Load-Pull System

Han Zhiguo,Liang Faguo,Luan Peng,Li Suoyin,Li Jingqiang

Instrumentation, Measurement, Computer, Communication and Control（2013）

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摘要

This paper introduces in-situ calibration method of on-wafer load-pull system, researches the calibration uncertainty evaluation method of transfer standards for calibrating the on-wafer load-pull system. Using the GUM uncertainty framework and Mont Carlo Method (MCM) suggested by ISO/IEC to evaluate the calibration uncertainty separately. At last, by analyzing the results of two methods, this paper gives the reasonable transfer standards' uncertainty for calibrating the on-wafer load-pull system.

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关键词

gum uncertainty framework,in-situ calibration method,on-wafer load-pull system,calibration uncertainty,transfer standard,evaluation method,mont carlo method,reasonable transfer standard,calibration uncertainty evaluation method,transfer standards,uncertainty,scattering parameters,calibration,reflectivity,mathematical model

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