Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules
Microelectronic Engineering(2013)
Abstract
This study presents the micromachining of CuIn"xGa"("1"-"x")Se"2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.
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Key words
one-time scribing technique,integrated laser system,high-precision motor,galvano-mirror scanner,acceptable throughput,precise ultrafast laser,femtosecond laser source,high repetition rate,ultrafast laser ablation setup,front contact layer,cigs pv module,photovoltaic,renewable energy,thin film,micromachining
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