Leak detection methods for glass capped and polymer sealed MEMS packaging
Microsystem Technologies - Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2010(2011)
Abstract
This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × 10 −3 cm 3 . Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method.
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Key words
Dwell Time,Leak Rate,Cavity Volume,Leak Test,Leak Channel
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