Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

MICROELECTRONIC ENGINEERING(2011)

Cited 24|Views0
No score
Abstract
A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol-gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.
More
Translated text
Key words
sol–gel material,molded sol-gel relief,hybrid working stamp,sufficient stamp lifetime,hybrid polymer,inexpensive alternative,r2r embossing,roll embossing,hybrid layered molds,electroplated shim,high speed roll-to-roll,metal backbone,hybrid molds,hybrid mold,continuous imprint,stamp fabrication,nanoimprint lithography,flexible metal plate,high speed roll-to-roll nanoreplication,bendable stamp
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined