3D materials made of gold using Nanoimprint Lithography

In this work we show large area 3D stacking of gold structures like Split Ring Resonators (SRRs) and fishnet structures using Nanoimprint Lithography (NIL). Two main fabrication processes are used to stack multiple layers of such structures on top of each other: For the stacked fishnet structures a finished double-layer of gold structures is covered with a spacer layer which is planarized using chemical mechanical polishing so that a second layer can be processed on top. For the SRR structures a transfer printing process is used. Here the gold structures are transferred from one substrate onto another substrate. Especially this process is a new and unique possibility to stack gold patterns by transferring gold structures several time on the same substrate and therefore to build up 3D materials in a fast and cost efficient way.