Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

Microelectronic Engineering(2010)

引用 9|浏览2
暂无评分
摘要
This paper reports the well-controlled replication of nanostructures with features sizes as small as 50nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2'' silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules.
更多
查看译文
关键词
disposable polymer optical biochips,features size,silicon wafer,evanescent wave,exchangeable mold insert,nanopatterned polymethylpentene,optical waveguides,optical biosensor,pmp injection molding process,label-free detection,polymethylpentene,injection molding,nanopatterning,biophotonic application,well-controlled replication,planar optical polymer waveguide,optical waveguide
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要