Boundary Element Method Macromodels For 2-D Hierarchical Capacitance Extraction?

A 2-D hierarchical field solution method was recently introduced for capacitance extraction for VLSI interconnect modeling. In this paper, we present several extensions to the method including a Boundary Element Method (BEM) formulation for creating macromodels, which provides a better trade-off between accuracy and efficiency, as well as parameterized elements, which allow the analysis of gridless designs with reasonable accuracy and a small library size.