基本信息
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Bio
本课题组主要从事特种功能薄膜材料的制备、性质及应用,材料的微纳图形制备工艺、性质及应用、超表面的设计和制备。课题组拥有先进的制备及分析测试设备,包括紫外光刻机、PECVD、磁控溅射、ICP刻蚀、椭圆偏振光谱仪、红外光谱仪、紫外-可见-近红外光谱仪、紫外-可见光纤光谱仪,光学显微镜、I-V/C-V测试设备,等。
Research Interests
Papers共 72 篇Author StatisticsCo-AuthorSimilar Experts
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Journal of physicsno. 1 (2023): 012042-012042
scientific and technological innovationInformation (2022)
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