基本信息
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Career Trajectory
Bio
研究方向
面向先进纳米制造与晶圆光刻领域对超精密纳米计量光栅的需求,应用原子光刻技术、软X射线干涉光刻技术、多层膜光栅技术等,开展光栅、线宽等标准物质研制及应用工作。具体研究方向包括:(1)长度标准物质研制;(2)皮米级精密微位移测量;(3)计算纳米测量技术。
围绕上述研究方向,共发表SCI论文15篇(其中一作/通讯共9篇),申请国家发明专利4项(授权2项),国家一级标准物质2项,软件著作权登记3项。作为项目负责人共承担国家重点研发计划项目(2019)、国家自然科学基金面上项目(2020)、国家自然科学基金青年项目(2017)各1项。
Research Interests
Papers共 85 篇Author StatisticsCo-AuthorSimilar Experts
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MEASUREMENT SCIENCE AND TECHNOLOGYno. 3 (2024)
APPLIED OPTICSno. 8 (2024): 2065-2069
JOURNAL OF PHYSICS D-APPLIED PHYSICSno. 27 (2024)
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2024): 285-293
Zhang Yujie, Xu Lei,Guan Yuqing,Zou Wenzhe,Guo Chuangwei,Lei Lihua,Fu Yunxia, Guo Zhenyan,Gu Zhenjie,Deng Xiao
Infrared and Laser Engineeringno. 4 (2023)
PHOTONICSno. 11 (2023): 1272-1272
Zhenjie Gu,Zhangning Xie, Zhikun Chang,Guangxu Xiao,Zhijun Yin,Zichao Lin, Tong Zhou,Lihua Lei,Tao Jin,Dongbai Xue,Xiao Deng, Xinbin Chen,
arXiv (Cornell University) (2023)
Ultramicroscopy (2023): 113734-113734
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