基本信息
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Bio
Wei-Su Chen received the B.S. and M.S. degrees in electronic engineering from National Tsing-Hua University, Hsinchu City, Taiwan, in 1988 and 1990, respectively.
Since 1997, he has been with the Electronic and Optoelectronic Research Laboratories, Industrial Technology Research Institute (ITRI), Hsinchu, Taiwan, where he is currently a Project Manager of the Department II of Nonvolatile Memory. He is the holder of 16 papers in SPIE Advanced Lithography Conference, one paper in IEDM as first author, and author/coauthors of over 20 papers in many fields till now. His recent research focuses on atomic layer deposition unit process development and process integration for RRAM and 3D–IC applications, MRAM, PCM, E-beam/DUV lithography, Organic LED (OLED)/memory, RF-MEMS, Semiconductor/MEMS, and GaAs MESFET.
Mr. Chen received the ITRI awards for phase change memory related topics in 2005 and 2007.
Research Interests
Papers共 73 篇Author StatisticsCo-AuthorSimilar Experts
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Author Statistics
#Papers: 77
#Citation: 2220
H-Index: 23
G-Index: 46
Sociability: 5
Diversity: 1
Activity: 0
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