基本信息
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Bio
Wolfgang Benecke was born in Germany in 1953. He received the Dipl.-Phys. degree from the Technical University of Clausthal, Clausthal-Zellerfeld, Germany, and the Ph.D. degree in material science from the Technical University of Berlin, Berlin, Germany, in 1982.
From 1984 to 1992, he was with Fraunhofer Institute (FhG), Berlin, where he was the Head of the Department of Micromechanics and MEMS. Since 1992, he has been a Full Professor with the University of Bremen, Bremen, Germany, where he founded the Institute for Microsensors, Actuators, and Systems (IMSAS) under the Faculty of Physics and Electrical Engineering. IMSAS is working on MEMS, covering the spectrum from conception to realization, focusing on technological aspects around silicon-based systems. He is in charge of state-of-the-art facilities for the realization of MEMS devices and is a cofounder and shareholder of microFAB GmbH, Bremen (i.e., an enterprise offering technology services (wafer foundry) for MEMS fabrication) and Campus Micro Technologies GmbH, Bremen, which focuses on system integration.
Research Interests
Papers共 157 篇Author StatisticsCo-AuthorSimilar Experts
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Microsystem Technologiesno. 4 (2017): 1987-1994
Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017no. 4 (2017): 1-4
MICROMACHINESno. 7 (2017): 215
L. Ghimpu, T. Reimer,D. Smazna,M. Hoppe,W. Benecke, A. Bejenari,A. Cojocaru,O. Lupan,R. Adelung,I. Tiginyanu
3RD INTERNATIONAL CONFERENCE ON NANOTECHNOLOGIES AND BIOMEDICAL ENGINEERING (2016): 353-356
V. Postica, T. Reimer, E. Lazari,N. Ababii,S. Shishiyanu,S. Railean, V. Kaidas,S. Kaps,O. Lupan,W. Benecke,R. Adelung
3RD INTERNATIONAL CONFERENCE ON NANOTECHNOLOGIES AND BIOMEDICAL ENGINEERING (2016): 149-152
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Author Statistics
#Papers: 157
#Citation: 4601
H-Index: 34
G-Index: 34
Sociability: 6
Diversity: 2
Activity: 0
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