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Bio
He has published more than 170 papers in peer-reviewed int. journals, and has given invited-talks on low-temperature plasmas at more than 90 int. conferences in the fields of non-equilibrium plasmas, and related basic transport theory and surface processes. In 1988, he had his opportunity to present his original Relaxation-ConTinuum (RCT) model for a low-temperature, radio-frequency (RF) plasma simulation. Direct numerical procedure (DNP) of the Boltzmann equation was proposed to study the velocity distribution and the transport of electrons in RF-fields in 1994. Robot-assisted spatiotemporal optical emission spectroscopy, i.e. computerized-tomography (CT) was developed in RF plasmas. In 2000, he integrated his modeling into “Vertically Integrated CAD for Device Processing” (VicAddress) for feature profile prediction. His study of a non-equilibrium radiofrequency plasma interacting with a surface was collected into the special issue, “80 Years of Plasma” in PSST (2009). He has authored many books, including Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition) published by CRC Taylor & Francis Group (2014). He was on the Editorial Board of PSST and JPD. He has been a guest editor of special issues in JJAP, Aust. J. Phys., JVST-A, IEEE Tran. PS, and Appl. Surf. Sci. He received the awards “Fluid Science Prize” in 2003 from the Institute of Fluid Science (Tohoku Univ.); “Plasma Electronics Prize” in 2004 from JSAP; “Plasma Prize” in 2006 from the American Vacuum Society; and “DPS Nishizawa Award” in 2017 from the JSAP, for his “Pioneering contributions to plasma modeling and diagnostics as applied to plasma processing science and technology.” He is a foreign member of the Serbian Academy of Sciences and Arts (2013-). He is an elected Fellow of the Institute of Physics (UK), the American Vacuum Society (US), the Japan Society of Applied Physics, and the Japan Federation of Engineering Societies.
Research Interests
Papers共 352 篇Author StatisticsCo-AuthorSimilar Experts
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Japanese Journal of Applied Physicsno. 2 (2022)
APS Annual Gaseous Electronics Meeting Abstracts (2020)
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Author Statistics
#Papers: 351
#Citation: 7644
H-Index: 41
G-Index: 60
Sociability: 6
Diversity: 3
Activity: 14
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