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Bio
Dr. Grotjohn's scholarly interests include the modeling, design, diagnostics, and control of plasma-assisted materials processes and processing machines. This work focuses on the use of models, including electromagnetic, plasma dynamic, and plasma chemistry models, for the design and control of microwave plasma reactors used for materials processing. Specific processes studied have included diamond CVD deposition, amorphous carbon deposition, semiconductor etching, and general microwave-generated plasma discharges operated as ion and radical sources. In coordination with the modeling studies are plasma diagnostic studies including a variety of techniques including optical emission spectroscopy, laser spectroscopy, Langmuir probes, and millimeter wave resonator diagnostics. Recent work is especially looking at mini- and micro-scale plasma discharges and their application.
Research Interests
Papers共 60 篇Author StatisticsCo-AuthorSimilar Experts
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DIAMOND AND RELATED MATERIALS (2024): 110691
ADVANCED ELECTRONIC MATERIALSno. 5 (2023): n/a-n/a
Ricardo Vidrio,Daniel Vincent,Benjamin Bachman, Cesar Saucedo,Maryam Zahedian, Zihong Xu,Junyu Lai,Timothy A. Grotjohn,Shimon Kolkowitz,Jung-Hun Seo,Robert J. Hamers,Keith G. Ray,
Materials for Quantum Technologyno. 2 (2023): 025201
2021 IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, ANTENNAS, COMMUNICATIONS AND ELECTRONIC SYSTEMS (COMCAS)pp.111-115, (2021)
JOURNAL OF ELECTRONIC MATERIALSno. 12 (2021): 6888-6896
X. Konstantinou, C. J. Herrera-Rodriguez,M. T. Craton,A. Hardy,C. Crump,J. D. Albrecht,Q. H. Fan,Timothy A. Grotjohn,John Papapolymerou
2020 IEEE USNC-CNC-URSI North American Radio Science Meeting (Joint with AP-S Symposium)pp.123-124, (2020)
Xenofon Konstantinou, Cristian J. Herrera-Rodriquez,Aaron Hardy,John D. Albrecht,Timothy Grotjohn,John Papapolymerou
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