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Bio
Seán Barry is a Full Professor at Carleton University (Ottawa, Canada), where he works on precursor compounds for atomic layer deposition (ALD).
He was trained in inorganic synthetic chemistry by Darrin Richeson (PhD, University of Ottawa, 1996), and spent three years working on chemical vapour deposition (CVD) and ALD precursors in the group of Roy Gordon (PDF, Harvard University, 1998 – 2000, 2002 -2003). He was instrumental in the design and synthesis of the well-known copper amidinate dimers that are presently used for copper CVD/ALD.
Seán started in Carleton University in 2003 working on guanidinates of the group 13 metals (Al, Ga, In), and has recently studied guanidinates, iminopyrrolidinates and carbenes of the coinage metals (Cu, Ag, Au) for the purpose of depositing thin films of these metals. His group works mainly on the mechanisms of thermal decomposition and thin film deposition, and have invented several novel characterization methods to better understand mechanism.
He is the director of a nanofabrication facility to explore nanoscience, surfaces, and sensor interfaces (FANSSI). Seán's current research interest is in the mechanisms of metal thin film formation by CVD and ALD, specifically for designing new, stable precursors for metal depositions, and is keenly interested in developing processes for depositing gold and silver metal films by ALD.
Research Interests
Papers共 139 篇Author StatisticsCo-AuthorSimilar Experts
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Justin T. Lomax,Eden Goodwin,Mark D. Aloisio,Alex J. Veinot,Ishwar Singh, Wai-Tung Shiu, Maram Bakiro, Jordan Bentley,Joseph F. DeJesus,Peter G. Gordon,Lijia Liu,Sean Barry,
CHEMISTRY OF MATERIALS (2024)
ACS Applied Nano Materialsno. 10 (2024): 11225-11233
CHEMISTRY OF MATERIALSno. 4 (2023): 1579-1585
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 5 (2023)
Physical chemistry chemical physics : PCCPno. 12 (2023): 8336-8340
Inorganic chemistryno. 51 (2023): 21061-21073
Clinical pharmacology and therapeuticsno. 4 (2023): 933-933
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 2 (2023)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 1 (2023)
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Author Statistics
#Papers: 149
#Citation: 2584
H-Index: 28
G-Index: 46
Sociability: 6
Diversity: 0
Activity: 2
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