基本信息
views: 44
![](https://originalfileserver.aminer.cn/sys/aminer/icon/show-trajectory.png)
Bio
Richard A. Allen (SM'02) received the B.S. and M.S. degrees from Rensselaer Polytechnic Institute, Troy, NY, in 1982 and 1984, respectively, both in physics, and the M.B.A. degree from Columbia Union College, Takoma Park, MD, in 2007.
He is currently a Physicist with the Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology, Gaithersburg, MD. His current research interests include developing metrology test structures and standards for microfluidics, microelectromechanical systems, and microelectronics applications.
Since May 2011, he has been the NIST Assignee to the 3-D Enablement Center of SEMATECH, Albany, NY. At SEMATECH, he is leading activities in standards for 3-D-stacked integrated circuits. Prior to joining NIST in June 1990, he was with the Jet Propulsion Laboratory in Pasadena, CA, where he developed test structures for in situmonitoring space radiation effects in the VLSI Technology Group and at College Park Software, Altadena, CA, where he worked on the development of LISP-based expert systems tools.
Mr. Allen is a member of the American Physical Society.
Research Interests
Papers共 151 篇Author StatisticsCo-AuthorSimilar Experts
By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Proceedings of the 7th IMEKO TC16 Conference on Pressure and Vacuum Measurement (2024)
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC)pp.1-1, (2021)
Frontiers in Optics + Laser Science 2021 (2021)
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)pp.1-2, (2021)
JASA EXPRESS LETTERSno. 8 (2021): 082803
Frontiers in Optics / Laser Science (2020), paper LM7F.3 (2020)
Load More
Author Statistics
#Papers: 156
#Citation: 1875
H-Index: 23
G-Index: 34
Sociability: 6
Diversity: 1
Activity: 0
Co-Author
Co-Institution
D-Core
- 合作者
- 学生
- 导师
Data Disclaimer
The page data are from open Internet sources, cooperative publishers and automatic analysis results through AI technology. We do not make any commitments and guarantees for the validity, accuracy, correctness, reliability, completeness and timeliness of the page data. If you have any questions, please contact us by email: report@aminer.cn