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Research Interests

Papers共 3 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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450mm Cu single damascene BEOL process with 20nm half-pitched features
Sun-OO Kim,Shannon Dunn,Steven Smith, WenLi Collision, Jamie Prudhomme, Huey-Ming Wang, Joe Maniscalco, Nithin Yathapu,Chulgi Song, Barry Wang, Christopher R. Carr, Hsi-Wen Liu,
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC...（2016）
Cited8Views0EIWOSBibtex
8
0
Opportunities and challenges of the 450mm transition
John Lin,Pinyen Lin,Wenyu Ku,Mark C Kelling, Greg Akiki, Sangdong Kwon, Kwangwook Lee,Wenli Collison, Stock Chang, Rand Cottle, Yuchih Wang,Christopher Borst,
Electron Devices Meeting（2013）
Cited5Views0EIWOSBibtex
5
0
Author Statistics
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