Partha Mukhopadhyay - The College of Optics and Photonics, University of Central Florida

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Influence of Heat Treatment on the Quality of Die-to-Wafer Hybrid Bond Interconnects

Laura Wenzel,Catharina Rudolph, Adil Shehzad,Partha Mukhopadhyay, H. Jim Fulford, Manuela Junghaehnel, Juliana Panchenko

2024 IEEE 74th Electronic Components and Technology Conference (ECTC)pp.1830-1836, (2024)

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Annealing Effects in Sub-8 μm Pitch Die-to-Wafer Hybrid Bonding

Partha Mukhopadhyay, Laura Wenzel,Catharina Rudolph, Andrew Tuchman, Kevin Ryan, Adam Gildea, Chris Nichols, John Allgair,Sitaram Arkalgud, Anton deVilliers, Jim Fulford

2024 IEEE 74th Electronic Components and Technology Conference (ECTC)pp.1923-1928, (2024)

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High-Performance HfO₂/Al₂O₃ Superlattice MIM Capacitor in a 200 mm High-Volume Batch-ALD Platform

Partha Mukhopadhyay, Ivan Fletcher, Zuriel C. Couvertier, Julio Morris, Jennifer Perez, Chris Nichols, John Allgair,Winston V. Schoenfeld, Jim Vandevere, Sara Aoki, Enzo Novoselic, Shara Lombardo,

IEEE TRANSACTIONS ON ELECTRON DEVICES (2024)

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Superlattice MIM Capacitor in a 200 mm High-Vol..

Partha Mukhopadhyay, Ivan Fletcher, Zuriel C. Couvertier, Julio Morris, Jennifer Perez, Chris Nichols, John Allgair, Jim Vandevere,Winston V. Schoenfeld, Sara Aoki, Enzo Novoselic, Shara Lombardo,

IEEE Transactions on Electron Devicesno. 99 (2024): 1-7

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Nucleation of highly uniform AlN thin films by high volume batch ALD on 200 mm platform

Partha Mukhopadhyay, Ivan Fletcher, Zuriel Caribe Couvertier, Brent Schwab, John Gumpher,Winston V. Schoenfeld, Jon Kretzschmar, Anton DeVilliers, Jim Fulford

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 3 (2024)

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Tin/gallium oxide alloying probed using X-ray microanalysis and cathodoluminescence (Conference Presentation)