基本信息
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Bio
Noriaki Toyoda (M'07) received the M.S. and Ph.D. degrees in electronic engineering from Kyoto University, Kyoto, Japan, in 1999.
From 1999 to 2001, he was a Postdoctoral Researcher with the Material Processing Center, Massachusetts Institute of Technology, Cambridge, where he worked in the research of the fundamental collision process by gas cluster ion impacts. from 2001 to 2007, he was a Visiting Associate Professor with the Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology (currently, University of Hyogo), Himeji, Japan, where he worked on the development of the gas cluster ion beam source and the surface modification process with gas cluster ion beams. Since 2007, he has been an Associate Professor with the Incubation Center, University of Hyogo. He has made great contributions to the development of gas cluster ion beam equipment and the surface process. He has authored or coauthored more than 80 papers related to gas cluster ion beam technology. His current research interests include fundamental impact phenomena of gas cluster ions and its industrial applications.
Research Interests
Papers共 235 篇Author StatisticsCo-AuthorSimilar Experts
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (2024): 165317
Japanese Journal of Applied Physicsno. SG (2023): SG1051-SG1051
S. Hanahara,N. Toyoda
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)pp.7-7, (2021)
The Japan Society of Applied Physics (2021)
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The Japan Society of Applied Physics (2021)
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The Japan Society of Applied Physics (2021)
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Inorganic Chemistryno. 24 (2020): 17945-17957
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