基本信息
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Bio
Ming-Chi Liaw was born in Ping-Tung, Taiwan, R.O.C., in 1966. He received the B.S. degree in chemistry from National Changhua University of Education, Changhua, Taiwan, in 1988, and the M.S. and Ph.D. degrees in inorganic chemistry from National Taiwan University, Taipei, in 1990 and 1994, respectively.
He joined the National Nano Device Laboratory, Hsinchu, Taiwan, as a Research Associate in 1994. His research involves exploring sidewall residue formation mechanism, developing stripping method and development of new cleaning solutions for pre-gate oxide deposition and post-CMP cleaning process. He is also interested in gate engineering for suppressing boron penetration mechanism study and gate silicide process.
Research Interests
Papers共 18 篇Author StatisticsCo-AuthorSimilar Experts
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Hangting Lue,Tzuhsuan Hsu, S Lai,Y J Chen, K F Chen, Chester Lo,I J Huang,T T Han, M S Chen,W P Lu,C S Chang,Mingchi Liaw,
Hangting Lue, Jifong Pan,C S Chang,Szuyu Wang, Y F Chang, Y C Lee,Mingchi Liaw,Y J Chen, Chester Lo,I J Huang,T T Han, M S Chen,
Reliability Physics Symposiumpp.627-633, (2010)
Y H Shih,E K Lai,J Y Hsieh, T H Hsu,M D Wu,Chih Peng Lu, K P Ni, T Y Chou,L W Yang,K Y Hsieh,Mingchi Liaw,W P Lu,
mag(2004)
Cited31Views0Bibtex
31
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mag(2003)
Cited29Views0Bibtex
29
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mag(1998)
Cited23Views0Bibtex
23
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