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Career Trajectory
Bio
Michael Bain received the B.Sc. (Hons.) degree in physics and electronics from the University of Dundee, Scotland, U.K., and the Ph.D. degree from Queen's University Belfast (QUB), Belfast, U.K., in 1994 and 2000, respectively.
In November 1998, he joined the Northern Ireland Semiconductor Research Centre (NISRC) at QUB, where he is currently employed as a Research Fellow. Working on a number of EPSRC-funded projects, he has gained significant expertise in a variety of bonding techniques and has developed technologies for the integration of metallic layers into SOI substrates. He has had regular access to, and received training in, the industrial clean-room facilities at Icemos Technologies Belfast, which is a certified standard ISO 9001:2000 company. These include a class “1” bonding room. He has significant expertise in the deposition and characterization of PVD and CVD metal layers and has conducted collaborative research with industry on the metallization of sub-micron trenches. He has considerable experience in MEMS fabrication by surface and bulk micromachining. Using a combination of DRIE, thick resists, aligned bonding, and anodic bonding a photoacoustic gas sensor was successfully miniaturized to chip scale. He has coauthored over 40 publications.
Research Interests
Papers共 31 篇Author StatisticsCo-AuthorSimilar Experts
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Harold Gamble,Paul B. Baine,Yee Low,Paul Rainey, Jenny Montgomery,Michael Bain,B.M. Armstrong,David McNeill,Neil Mitchell
ECS transactions (2019)
mag(2011)
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ECS Meeting Abstractsno. 45 (2011): 2579-2579
ADVANCED GATE STACK, SOURCE/DRAIN, AND CHANNEL ENGINEERING FOR SI-BASED CMOS 6: NEW MATERIALS, PROCESSES, AND EQUIPMENTno. 1 (2010): 331-341
ECS Meeting Abstractsno. 17 (2010): 946-946
ISTC/CSTIC 2009 (CISTC)no. 1 (2009): 9-14
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