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个人简介
Marc Heyns received the M.S. degree in applied sciences (electronics) from the University of Leuven, Belgium, in 1979, and the Ph.D. degree from the University of Leuven in 1986. In 1986, he joined IMEC, where he became the Department Director and the Program Director responsible for a research group working on ultraclean processing technology, advanced high-gate stacks, environmentally benign processing, Ge and III/V CMOS, advanced devices, and 2-D materials. He became an IMEC-Fellow in 2001 and a Professor with the Department of Materials Engineering, KU Leuven in 2005, where he is a Program Director of the Master on Nanoscience, Nanotechnology, and Nano-Engineering.
He has initiated and led as a Program Director various research programs with IMEC, including activities on ultraclean processing, high-k dielectrics, Ge and III-V CMOS, TunnelFETS, and graphene. His current research interests focus on “Exploratory and Beyond CMOS Technologies,” including research on novel materials and devices for ultimate CMOS, nanowires, 2-D materials, topological materials, quantum computing, and spin-based devices.
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2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)pp.340-342, (2022)
physica status solidi (a) (2022)
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)pp.340-342, (2022)
2021 IEEE International Interconnect Technology Conference (IITC)pp.1-3, (2021)
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作者统计
#Papers: 509
#Citation: 9389
H-Index: 44
G-Index: 75
Sociability: 7
Diversity: 3
Activity: 63
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