基本信息
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Bio
The most successful patents: Three patents related to ellipsometric porosimetry
(EP). The EP system is presently under industrial production by Company “Semilab”
and it is a standard system for evaluation of nanoporous low-k films developed for
nanoelectronics. Four (4) patents related to damage free cryogenic etching that
allowed to achieve the lowest integrated k-value in ultralow-k materials.
Research Fields
PLASMA APPLICATIONSOL-GEL CHEMISTRY; AEROGELS; HYBRID MATERIALS; POROUS MATERIALS, NANOTECHNOLOGY, BIOTECHNOLOGYSOL-GEL PROCESS, NANOSTRUCTURED SURFACES, MATERIALS ENGINEERING, SCIENCE OF MATERIALS, MATERIAL CHARACTERIZATION, ENVIRONMENTAL ENGINEERINGSURFACE CHEMISTRY, FUNCTIONAL THIN FILM, SELF-ASSEMBLY
Research Interests
Papers共 476 篇Author StatisticsCo-AuthorSimilar Experts
By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Plasma Processes and Polymers (2024)
PLASMA PROCESSES AND POLYMERS (2024)
Microporous and Mesoporous Materials (2024): 112783-112783
Nanomaterials (Basel, Switzerland)no. 8 (2023): 1419-1419
PLASMA PROCESSES AND POLYMERSno. 4 (2023)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 5 (2023)
COATINGSno. 9 (2023): 1656-1656
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