基本信息
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Career Trajectory
Bio
Koichi Ohto received the B.S. degree in engineering from the University of Kyushu, Fukuoka, Japan, in 1991.
In 1991, he was with NEC Corporation, Sagamihara, Japan. He is currently a member of the Manufacturing Operation Unit, Process Technology Division, NEC Electronics Corporation, Kawasaki, Japan. He is engaged in the development of chemical-vapor-deposition process for 90-nm node devices and beyond.
Research Interests
Papers共 14 篇Author StatisticsCo-AuthorSimilar Experts
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Microelectronic Engineering (2013): 205-209
Tatsuya Usami,Yasuyuki Miura,Takashi Nakamura,Hana Tsuchiya, C Kobayashi,Keisuke Ohto, S Hiroshima,Manobu Tanaka,Hiromitsu Kunishima,Ineo Ishizuka, Takeshi Kuwajima,M Sakurai,
Natsue Y Kawahara,Masayoshi Tagami,B Withers,Yumi Kakuhara, Hajime Imura,Keisuke Ohto,Toshiji Taiji,Kishio Arita, Takakazu Kurokawa,Masao Nagase, T Maruyama,Naoki Oda,
ADVANCED METALLIZATION CONFERENCE 2003 (AMC 2003)pp.415-419, (2004)
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