Katia Devriendt

Katia Devriendt received her Ph.D. degree in Chemistry at the University of Leuven, Belgium in June 1997 and worked since than in the Electrodepositing, CMP and Thinning group at imec, Belgium. She was involved in the process development of STI, ILD, W and Al CMP and post-CMP cleaning processes. She is currently involved in the FEOL CMP process steps and modules development of the 14 nm FinFET technology as a senior R&D engineer.