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Research Interests

Papers共 6 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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Overlay performances of wafer scale nanoimprint lithography
Jérôme Rêche, Api Warsono, Anaïs De Lehelle D'Affroux,Jonas Khan,Sebastian Haumann, Andrea Kneidinger
Novel Patterning Technologies 2023 (2023)
Cited0Views0Bibtex
0
0
Manufacturing assessment of sub 100 nm features in Si/SiO2 substrates based on EVG nanoimprint solution for 8 inch substrates
Hubert Teyssèdre,Florian Delachat, Manuela Stirner,Jonas Khan, Alain, Campo, Fabrice Kouemeni Tchouake,Peter Ledel, Mustapha Chouiki
semanticscholar（2019）
Cited0Views0Bibtex
0
0
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