John S Petersen

2-color, STED like, lithography is known. We've determined that while 9 nm single feature printing has been demonstrated the method is pitch resolution limited due to background buildup of final photoproduct. A remedy may exist using 3+ colors. We're researching 3-color photoactivated molecular switches to be used for super-resolution nanolithography using computational chemistry driven synthesis, femtosecond and slower photokinetcs and multi-wavelength interference & direct-write lithography.