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Research Interests

Papers共 53 篇Author StatisticsCo-AuthorSimilar Experts

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Low-temperature atomic-level trimming on Ge interfused surface for gate-all-around Si nanosheets transistors
Guan-Qiao Sang, Ren-Jie Jiang, Yan-Zhao Wei, Qing-Kun Li, Mei-He Zhang,Jia-Xin Yao,Yi-Hong Lu,Lei Cao,Jun-Feng Li, Xu-Lei Qin,Qing-Zhu Zhang,Hua-Xiang Yin
Rare Metalspp.1-9, (2024)
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Improvement of Line Roughness of Fin by Conventional Thermal Oxidation and Atomic Level Low-Temperature Ozone Treatments
Peng Wang, Guanqiao Sang,Yihong Lu,Wenjuan Xiong, Renjie Jiang,Lei Cao, QingKun Li,Lianlian Li,Jiaxin Yao,Yadong Zhang, Meihe Zhang,Qingzhu Zhang,
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)pp.1-3, (2024)
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