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Papers共 12 篇Author StatisticsCo-AuthorSimilar Experts

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$\Textit{c}$ -Axis Oriented HZO on Flat Amorphous TiN Achieving High Uniformity, Breakdown Field, Final 2P $_{\text{r}}$ , and Endurance
Zefu Zhao, Yu-Tsung Liao,Yu-Rui Chen,Yun-Wen Chen,Wan-Hsuan Hsieh,Jer-Fu Wang, Yu-An Chen, Hao-Yi Lu, Wei-Teng Hsu, Dai-Ying Lee,Ming-Hsiu Lee,C. W. Liu
IEEE TRANSACTIONS ON ELECTRON DEVICESno. 1 (2025): 222-227
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Engineering HZO by Flat Amorphous TiN with 0.3nm Roughness Achieving Uniform C-Axis Alignment, Record High Breakdown Field (~10nm HZO), and Record Final 2pr of 56 Μc/cm2 with Endurance > 4E12
Zefu Zhao,Yu-Rui Chen, Yu-Tsung Liao,Yun-Wen Chen,Wan-Hsuan Hsieh,Jer-Fu Wang, Yu-An Chen, Hao-Yi Lu, Wei-Teng Hsu, Dai-Ying Lee,Ming-Hsiu Lee,C. W. Liu
2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)pp.1-2, (2024)
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