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Research Interests

Papers共 5 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Advanced BEOL process integration for logic technology nodes
Chanhoo Park, Minkwon Choi,ChangHyun Kim, Bonhyeok Koo, O Young Kweon, Jinhyeung Park, Juyoung Jung,Yunki Choi,Kyoung-Woo Lee,Jeong Hoon Ahn,Ja-Hum Ku
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)pp.1-3, (2023)
Cited0Views0EIWOSBibtex
0
0
Extreamly Advanced Cu Interconnect with Selective ALD Barrier for High Performance Logic Device
Junki Jang, Kyoungpil Park, Chibeom Park, Seungyong Yoo, Seungkeun Cha, Kyounghee Nam, Kihyun Kim, Jeongwook Son,Eunyoung Park, Jaeho Lee,Joosung Kim,Miji Lee,
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)pp.1-3, (2023)
Cited0Views0EIWOSBibtex
0
0
The Second Generation of Integrated Stack Capacitor (ISC) for Power Integrity Improvement
Won Ji Park, Jae Hee Oh,Shaofeng Ding, Woo Seong Jang, Hyung Won Kim, Young Bin Hyun, Tae Kyun Kim, Seung Ki Nam,Jung Il Son, Seong Wook Moon,Jeong Hoon Ahn,Ja Hum Ku,
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)pp.1-3, (2023)
Cited0Views0EIWOSBibtex
0
0
Galvanic Corrosion Effect of Co Liner on ALD TaN Barrier
Junki Jang,Changhyun Kim,Youngsoo Yoon,Yunki Choi,Hoon Kim,Jungil Park,Jaehyeong Park, Minguk Kang,Youngwoo Kim, Seonguk Jang, Junghwan Ahn,Eunyoung Park,
2022 IEEE International Interconnect Technology Conference (IITC)pp.51-53, (2022)
Cited2Views0EIWOSBibtex
2
0
EUV Minimum Pitch Single Patterning for 5nm Node Manufacturing
Jungil Park,Yunki Choi,Jeong Hoon Ahn, Byung Je Jung, Hoyoun Lee, Jinho Kim,Eunyoung Park,Jaehyeong Park, Hyun-Ji Song,Miji Lee,Ja-Hum Ku
2022 IEEE International Interconnect Technology Conference (IITC)pp.133-135, (2022)
Cited0Views0EIWOSBibtex
0
0
Author Statistics
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