基本信息
浏览量:37
![](https://originalfileserver.aminer.cn/sys/aminer/icon/show-trajectory.png)
个人简介
James P. McVittie (M'75–SM'81) received the B.S.E.E. degree from the University of Illinois, Urbana, and the M.S.E.E. and Ph.D. degrees from Stanford University, Stanford, CA, respectively.
From 1972 to 1974, he was Member of Technical Staff with the Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, where he worked on IV-VI materials for lasers and detectors. In 1974, he was with the Xerox Palo Alto Research Center, Palo Alto, CA, where he worked on MOS interfaces and CCDs. He became a permanent Member of Research Staff of Stanford's Integrated Circuit Laboratory research staff in 1981, where he worked on CMOS process development. From 1985 to 2002, he has headed a research group responsible for process development and modeling in CVD and plasma etch processes. He has coauthored more than 150 technical papers. His current research interests include ALD, plasma etching, nanotubes, nanowires, and semiconductor devices.
Dr. McVittie was the Chairman of the Northern California Chapter of the American Vacuum Society in 1991. He was also the Chairman of the Bay Area Plasma Etch User's Group from 1989 to 1990 and from 2005 to 2006, and of the Northern California Electronic Materials Symposium in 1987. He is a past member of the Program Committees for the International Electron Devices Meeting, International Reliability Physics Symposium, the International Symposium on Plasma Process-Induced Damage (P2ID), and various American Vacuum Society conferences. He is the 1996 recipient of the Tegal Thinker Award for outstanding work in the area of plasma etching and the 1998 recipient of the International Symposium on Plasma Process-Induced Damage Award.
研究兴趣
论文共 185 篇作者统计合作学者相似作者
按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
2013 THIRD BERKELEY SYMPOSIUM ON ENERGY EFFICIENT ELECTRONIC SYSTEMS (E3S) (2013)
加载更多
作者统计
#Papers: 182
#Citation: 7037
H-Index: 42
G-Index: 80
Sociability: 6
Diversity: 1
Activity: 0
合作学者
合作机构
D-Core
- 合作者
- 学生
- 导师
数据免责声明
页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn