基本信息
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Career Trajectory
Bio
Hong Xiao received the Ph.D. degree from the Department of Physics, University of Texas at Austin, Austin, TX, USA. He served as a Technologist with the EBEAM Division, KLA-Tencor Corporation. His expertise is in the applications of e-beam defect inspection and e-beam defect review in IC chip manufacturing processes. He was a Marketing Specialist with Hermes-Microvision Inc., and a Technical Manager of Strategy Marketing with Hermes Epitek. He was also a Consultant of Semiconductor Process Technology, a Senior Process Engineer with the Motorola Semiconductor Production Sector, and an Associate Professor of ACC in the Semiconductor Manufacturing Technology Program. He was a Senior Technical Instructor of Applied Materials with the Technical Training Department, University of Texas at Austin, with expertise in dielectric thin film deposition, semiconductor process integration, and plasma physics. He has authored over 30 journal and conference papers, and the textbook entitled Introduction to Semiconductor Manufacturing Technology 2nd edition (SPIE, 2012). The Chinese translations of the textbook were published in China and Taiwan in 2012. He holds 20 U.S. patents.
Research Interests
Papers共 44 篇Author StatisticsCo-AuthorSimilar Experts
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Ming Lei,Wu, Kevin,Hoang Nguyen, Mingchu King,Hong Xiao,Dmitry Spivak, James Brown,O Moreau,Paul C Macdonald
mag(2015)
Cited23Views0Bibtex
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mag(2014)
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mag(2013)
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e-Manufacturing & Design Collaboration Symposiumpp.1-4, (2013)
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Author Statistics
#Papers: 47
#Citation: 565
H-Index: 18
G-Index: 22
Sociability: 5
Diversity: 1
Activity: 0
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