Conducting application focused research and development projects in the fields of MEMS and MEMS based systems including design, simulation, process and systems integration as well as product qualification towards pilot fabrication.
Special Know-how and experience in micro scanning mirrors (e.g. for projection, metrology and imaging) light modulators (e.g. for lithography, adaptive optics), electrostatic micro and nano actuators (e.g. for micro loudspeakers), MEMS process technology incl. CMOS Integration and MEMS reliability.