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Research Interests

Papers共 21 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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合作机构
Vitreous carbon mask substrate for X-ray lithography
Georg Aigeldinger, Dawn M Skala, Stewart K Griffiths,A Alec Talin,Matthew W Losey, Chuyeu Peter Yang
mag（2009）
Cited25Views0Bibtex
25
0
Influence of mask substrate materials on resist sidewall roughness in deep X-ray lithography
G. Aigeldinger, C.-Y. P. Yang, D. M. Skala, D. H. Morse,A. A. Talin, S. K. Griffiths, J. T. Hachman, J. T. Ceremuga
Microsystem Technologiesno. 2 (2007): 277-286
Cited2Views0EIBibtex
2
0
3D micro-metrology using a nanofocus x-ray source
Arlyn Antolak,Georg Aigeldinger, Daniel Morse,Joseph Ceremuga
Micro-Electro-Mechanical Systems Division of the American Society of Mechanical Engineers (2005): 59-63
Cited0Views0Bibtex
0
0
Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
G. Aigeldinger, J. T. Ceremuga, D. M. Skala
Microsystem Technologiesno. 4-5 (2005): 379-384
Cited3Views0EIBibtex
3
0
An aluminum resist substrate for microfabrication by LIGA
James Kelly, Dale Boehme, Cheryl Hauck,Chu-Yeu Yang, Luke Hunter,Stewart Griffiths, Dorrance McLean,Georg Aigeldinger, Michelle Hekmaty, John Hachman, Matthew Losey, Dawn Skala,
mag（2005）
Cited0Views0Bibtex
0
0
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