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个人简介
Fulvio Mancarella received a MSc degree in electrical engineering and PhD degree in electronics and computer science in 2002 and 2006, respectively, both from Bologna University. In 2009, he joined the Institute of Microelectronics and Microsystem (IMM) of the Italian National Council (CNR) in Bologna. His research interests include development of plasma-based etching processes, design and manufacture of silicon microsystems (MEMS), with specific attention to the development of MEMS-based physical and chemical gas sensors.
研究兴趣
论文共 79 篇作者统计合作学者相似作者
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arXiv (Cornell University) (2023)
Materials Science Forum (2022): 235-240
Journal of Instrumentationno. 02 (2021): P02037-P02037
The European Physical Journal Cno. 2 (2021)
arXiv (Cornell University) (2020)
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