PROJECTS：
863 Project--- Study on MEMS multisensor and sensor array
863 Project---Research of maskless lithography system
863 Project---Lower cost non-cooling IR FPA based on CMOS process
NNSF Project--- Research of Cantilever with Micro-probe array processing and its application
NNSF Project--- New Optical readout non -cooling infrared imaging system
CAS project---- MEMS flexible smart skin study
CAS project----Wireless sensors net: uncooled IR imagine sensor
CAS project----key technology research of 3mm X-ray lithography
CAS project---- X-ray lithography utilizing technology research in 8mm MMIC device