基本信息
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Bio
He worked on various topics of nanoscience and technology, including atom optics, surface science, EUV lithography, resist materials, coherent scattering, lensless imaging, plasmonics, metamaterials, biosensing, semiconductor nanostructures, and nanofluidics. He is author/co-author of more than 200 papers, 3 book chapters, and 7 patent applications. He received Young investigator of the year award of Swiss Society for Optics and Microscopy in 2009. He is a fellow of SPIE.
His current research mainly focuses on methods of nanolithography and metrology using photons with short wavelengths and, in particular, at the extreme ultraviolet (EUV) wavelength.
His current research mainly focuses on methods of nanolithography and metrology using photons with short wavelengths and, in particular, at the extreme ultraviolet (EUV) wavelength.
Research Interests
Papers共 289 篇Author StatisticsCo-AuthorSimilar Experts
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Luong Nguyen Dang,Li-Ting Tseng, Anil Rajak, Thomas Gädda, Markus Laukkanen, Jagadish Salunke, Shima Moosakkani,Jyri Paulasaari,Juha Rantala,Michaela Vockenhuber,Dimitrios Kazazis,Yasin Ekinci
Advances in Patterning Materials and Processes XLI (2024)
Huiwen An,Jinping Chen,Yi Zeng,Tianjun Yu,Shuangqing Wang,Xudong Guo,Rui Hu, Peng Tian,Michaela Vockenhuber,Dimitrios Kazazis,Yasin Ekinci,Guoqiang Yang,
ACS Applied Polymer Materials (2024)
JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY (2024): 115684
ACS SENSORSno. 5 (2024): 2455-2464
Nature communicationsno. 1 (2024): 694-694
RSC Applied Interfacesno. 3 (2024): 544-551
ULTRAMICROSCOPY (2024): 113912-113912
Myung Mo Sung, Hyeonseok Ji, Jaehyuk Lee,Jinho Ahn, Chang Gyoun Kim,Sangsul Lee,Yasin Ekinci,Prajith Karadan,Dimitrios Kazazis
Optical and EUV Nanolithography XXXVII (2024)
Optical and EUV Nanolithography XXXVII (2024)
SPIE eBooks (2023)
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Author Statistics
#Papers: 294
#Citation: 6070
H-Index: 38
G-Index: 67
Sociability: 7
Diversity: 0
Activity: 3
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