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Papers共 18 篇Author StatisticsCo-AuthorSimilar Experts

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Holistic Litho-Etch Approach Towards High NA EUV Challenges
Soichiro Okada,Arnaud Dauendorffer,Yuhei Kuwahara,Satoru Shimura,Philippe Foubert,Danilo De Simone,Cong Que Dinh, Ken Ando, Atsushi Tsuboi, Nobuyuki Fukui,Arame Thiam,Yannick Feurprier,Kathleen Nafus
International Conference on Extreme Ultraviolet Lithography 2023 (2023)
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#Papers: 18

#Citation: 72

H-Index: 4

G-Index: 8

Sociability: 4

Diversity: 1

Activity: 1

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