基本信息
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个人简介
RESEARCH INTERESTS
Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas
RESEARCH AREAS
Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.
AREAS OF SPECIALITY
Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.
Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas
RESEARCH AREAS
Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.
AREAS OF SPECIALITY
Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.
研究兴趣
论文共 910 篇作者统计合作学者相似作者
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The Journal of Physical Chemistry A (2024)
The journal of physical chemistry. Ano. 13 (2024): 2656-2671
PLASMA SOURCES SCIENCE & TECHNOLOGYno. 1 (2024)
Journal of Vacuum Science & Technology Ano. 1 (2023)
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Plasma Sources Science and Technologyno. 8 (2023): 085001-085001
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Journal of Physics D: Applied Physicsno. 28 (2023): 285202-285202
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