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主要研究方向微电子及光电子材料超精密加工及性能研究。中国电子学会、中国材料学会、中国微米纳米学会高级会员。获省部级发明奖3项,完成“极大规模集成电路平坦化工艺与材料”国家02重大专项前瞻性应用示范项目中课题“碱性抛光液CMP工艺以及相关材料、工艺与设备关系的研究”1项;主研国家中长期02重大科技专项课题“20-14nm集成电路碱性抛光液与清洗液的研发”1项。主研及主持完成国家自然科学基金、省部级项目等10余项;发表学术论文100余篇,其中SCI、EI检索70余篇,SCI引文数十次;授权国家发明专利13项,美国发明专利2项。培养的硕士生发表SCI二区以上论文十余篇,分别获国家奖学金和河北省研究生优秀毕业生。获河北省多媒体大赛一等奖1次、二等奖1次;获河北工业大学教学成果奖1项、优秀共产党员1次、五比双创示范岗1次;获天津市教育系统优秀共产党员、五比双创示范岗等。
Research Interests
Papers共 217 篇Author StatisticsCo-AuthorSimilar Experts
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APPLIED SURFACE SCIENCE (2024): 159469
Changxin Dong,Xinhuan Niu, Jianghao Liu,Ni Zhan,Yida Zou, Chao He, Xinjie Li,Fu Luo,Yunhui Shi, Jiabao Cheng
ECS Journal of Solid State Science and Technology (2024)
Tribology Internationalpp.109832, (2024)
Materials Chemistry and Physics (2024): 129066
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)pp.1-3, (2024)
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)pp.1-3, (2024)
Ni Zhan, Chao He,Xinhuan Niu,Nannan Zhang,Yida Zou,Jianghao Liu, Changxin Dong, Xinjie Li,Jianwei Zhou
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS (2024): 133609
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)pp.1-3, (2024)
Tribology Internationalpp.109603, (2024)
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